| ZENFOCUS thin-film substrate technical route | |||
|---|---|---|---|
| Time | 2022.H2 | 2023.H1 | 2023.H4 |
| Wafer | 14nm | 7nm | 5nm |
| LTCC Substate Size | 150*150nm | 200*200nm | 300*300nm |
| LTCC Satck up | 20Layer | 30Layer | >50Layer |
| LTCC Pad Pitch | 250μm | 150μm | 120μm |
| LTCC Line/Space | 100/100μm | 50/50μm | 30/50μm |
| LTCC Flatness | ≤ 10μm | ≤ 10μm | ≤ 10μm |
| Thin Film Stack up | 1Layer | 3Layer | 6Layer |
| Thin Film Sad Pitch | 85μm | 50μm | 30μm |
| Thin Film Line/Space | 18/25μm | 10/10μm | 5/5μm |



















